| abstract |
Ends ( 134 a - 1 ) of projections ( 134 a ) do not contact a first substrate ( 11 ), forming a gap between the ends ( 134 a - 1 ) and the first substrate ( 11 ). The internal capacity of a suction pump ( 17 ) can be increased by an amount by which the projections ( 134 a ) are shortened, compared to a conventional structure in which pillars are formed to connect the ceiling and bottom of the cavity of a capillary pump. The capacity of the suction pump ( 17 ) can be increased without enlarging the planar shape. Further, the ends ( 134 a - 1 ) of the projections ( 134 a ) do not contact the first substrate ( 11 ), forming a gap between them. An impurity can pass through the gap, and clogging of the inside of the suction pump ( 17 ) with the impurity can be prevented, realizing a stable operation. |