| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a24e92a365e50b43d37e24cb02debe3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65f79223f3594742bae7d3d4ed982c27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0bda8e9da6d2a9fe4fcde3f315431ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f15108ccf18a53ab828419f49be32a6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a1363e6691006d46bcf1c9de04b4756
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b18b26c4edd00de011f95ff8107be17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20f276b608dbd2245d90448943abb73a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_244aca1ab1656c43d5140882ddce0939 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f42d0033ae76f6b12399062e40ad6f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7bd2eef9b03614a458e0951befe1064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be8ae651b7d3cd216630fb207d1065a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_570c3b508cb3d08ec6839a3d1590961c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e23915f67f5d77d3d0f6f9a633be8f9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac979c21e065c266e4be953e6c7de0bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b60e09e6055ca8eefc3382823a52454 |
| publicationDate |
2012-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8211323-B2 |
| titleOfInvention |
Method for the removal of doped surface layers on the back faces of crystalline silicon solar wafers |
| abstract |
The invention relates to a method for the one-sided removal of a doped surface layer on rear sides of crystalline silicon solar wafers. In accordance with the object set, doped surface layers should be able to be removed from rear sides of such solar wafers in a cost-effective manner and with a handling which is gentle on the substrate. In addition, the front side should not be modified. In accordance with the invention, an etching gas is directed onto the rear side surface of silicon solar wafers with a plasma atmospheric pressure. |
| priorityDate |
2005-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |