| abstract |
A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid; and an acid-generator component (B) which generates acid upon exposure, wherein said acid-generator component (B) comprises an acid generator (B1) including a compound represented by general formula (b1-11) shown below:n wherein R 7″ to R 9″ each independently represent an aryl group or an alkyl group, wherein two of R 7″ to R 9″ may be bonded to each other to form a ring with the sulfur atom, and at least one of R 7″ to R 9″ represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent; X − represents an anion; and R f represents a fluorinated alkyl group. |