| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eec514a68446bef421a314b406dbbfbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e41be012c898c7d0c5c4d0abdfd36fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4deb115d349f04064d5d8d32d5959c1d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2005-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3f5b65c9d5481afe8088014f996bc51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4d4a5d0750f4a26d956e005830fd415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e728437a1f16fddb541b04accd4902a0 |
| publicationDate |
2012-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8206561-B2 |
| titleOfInvention |
Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
| abstract |
A hollow cylindrical ceramic sintered body having high density, a process for producing the sintered boy, and a cylindrical ceramic sputtering target having high quality without cracks or breakage, are disclosed. The hollow cylindrical ceramic sintered body is obtained by placing a cylindrical ceramic molding to be sintered on a plate-like ceramic molding having a coefficient of sintering shrinkage similar to that of the cylindrical ceramic molding, and then sintering the resulting assembly, thereby obtaining a hollow cylindrical ceramic sintered body having a relative density of 95% or higher. The cylindrical ceramic sputtering target is prepared using the hollow cylindrical ceramic sintered body. |
| priorityDate |
2004-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |