| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf83328d853bc7476ca10212837b3a01 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00 |
| filingDate |
2009-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cd16d1b9b890ec271e29d57dbec4bcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_560ddae20786159f6185bf0837f33e31 |
| publicationDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8048761-B2 |
| titleOfInvention |
Fabricating method for crack stop structure enhancement of integrated circuit seal ring |
| abstract |
An improved crack stop structure (and method of forming) is provided within a die seal ring of an integrated circuit die to increase crack resistance during the dicing of a semiconductor wafer. The crack stop structure includes a stack layer (of alternating insulating and conductive layers) and an anchor system extending from the stack layer to a predetermined point below the surface of the substrate. A crack stop trench is formed in the substrate and filled with material having good crack resistance to anchor the stack layer to the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636750-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679855-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957657-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859237-B2 |
| priorityDate |
2009-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |