| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2010-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e2b7eea5763c7a099a81fcaf4655b84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30582fed182400e37cb602bbb2007bbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eccf985c324ab314fabe357be9a2a1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c14428c7e04437e2a4996cc0e059293d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d46b36f2df1764555485e0900029f1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20a0acd09c844995cb7c296a7b569a38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57f8c9e6a83fef4abf13f0154fb95222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94d06c11779197c4b391679fd96a1886 |
| publicationDate |
2011-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8013989-B2 |
| titleOfInvention |
Defects inspecting apparatus and defects inspecting method |
| abstract |
An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9503606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016189989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8508727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9049353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8736924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8228495-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8964088-B2 |
| priorityDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |