| abstract |
(57) [Summary] (Corrected) [Purpose] High-speed, high-accuracy, fully automatic detection of defects such as foreign particles enables complete defect inspection and sufficient defect inspection frequency sampling inspection. Provided are a defect detection device and a method thereof for obtaining a highly efficient substrate manufacturing line. Constitution means for conveying a substrate 1 having a repetitive pattern with different pitches, an illumination system 102 for linearly irradiating the substrate 1 with plane wave light, a spatial filter 106, and a spatial filter 106. , The detector 107 for detecting the optical image formed by the image forming optical system, and the spatial filter 10 among the signals detected by the detector 107. 6, an erasing means 203 for comparing and erasing signals generated based on a repetitive pattern having a large pitch on the substrate, and a defect detecting means for detecting a defect on the substrate based on the signal obtained from the erasing means 203. 206, 20 8 to 210 and 229 are provided. |