| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2009-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c8596303c79ccd9d9acbac8637d29ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87ebb71ef85387bd2cd0200823c40946
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03c2a1180b6e232a37e29520a62a2566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_896132a9b7bc95fc32fbb59ca9848661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_873194d10e1d98cd223c9c56c53a3d97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb65fdb99e7abe1b1d3efd6adc346a9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90f77f235a7b413000fc0b17c3f5752b |
| publicationDate |
2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7985664-B2 |
| titleOfInvention |
Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device |
| abstract |
The present invention relates to a film formation apparatus including a first transfer chamber having a roller for sending a substrate, a film formation chamber having a discharging electrode, a buffer chamber provided between the transfer chamber and the film formation chamber or between the film formation chambers, a slit provided in a portion where the substrate comes in and out in the buffer chamber, and a second transfer chamber having a roller for rewinding the substrate. The slit is provided with at least one touch roller, and the touch roller is in contact with a film formation surface of the substrate. In addition, the present invention also relates to a method for forming a film and a method for manufacturing a photoelectric conversion device that are performed by using such a film formation apparatus. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8913050-B2 |
| priorityDate |
2005-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |