| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13aa7b32ae00ed83af7dfaa0b6a1f7c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate |
2005-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1cbf5580ac369302c4603df6dee9da1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70eba3e00af83b06b9faaecb0ce8a9d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78cb136eea41c6a99e86cb6117a3bb61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e46d6749814a57178d99fc77026d2cd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_511d8dc8291696e37c3cbe09cd2a0139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd2cc237e35cb016f9a07f46214e50c |
| publicationDate |
2005-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005181606-A1 |
| titleOfInvention |
Layer forming method, product comprising the layer, optical film, dielectric-coated electrode and plasma discharge apparatus |
| abstract |
A layer forming method is disclosed which comprises the steps of supplying power of not less than 1 W/cm 2 at a high frequency voltage exceeding 100 kHz across a gap between a first electrode and a second electrode opposed to each other at atmospheric pressure or at approximately atmospheric pressure to induce a discharge, generating a reactive gas in a plasma state by the charge, and exposing a substrate to the reactive gas in a plasma state to form a layer on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010112235-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985664-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011281399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011232571-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009244471-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8192545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010075455-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11677094-B2 |
| priorityDate |
2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |