Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82a9e22a923eca64a02a97f0dfb493ed |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-06181 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-34 |
filingDate |
2010-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f48011f3ddf8839fd476aa7a4841cc7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b20f2473b4cd1e2f31e18a5e0b9a5748 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad3ee4fc2c9da84d919519369e48ff35 |
publicationDate |
2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7985620-B2 |
titleOfInvention |
Method of fabricating via first plus via last IC interconnect |
abstract |
A multi-tiered IC device contains a first die including a substrate with a first and second set of vias. The first set of vias extends from one side of the substrate, and the second set of vias extend from an opposite side of the substrate. Both sets of vias are coupled together. The first set of vias are physically smaller than the second set of vias. The first set of vias are produced prior to circuitry on the die, and the second set of vias are produced after circuitry on the die. A second die having a set of interconnects is stacked relative to the first die in which the interconnects couple to the first set of vias. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013093042-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343390-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9484293-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240373-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9847255-B2 |
priorityDate |
2008-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |