| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86ca1ceeea9f3c391cf78a818d3d68e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7427a04a3e7241ce1c80127e01f6c48a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2db480cfaea3b1cba6feb4b00dc379
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ff83b0bf052fa65ec8595c3f900e329 |
| publicationDate |
2011-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7955782-B2 |
| titleOfInvention |
Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same |
| abstract |
Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10007184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10031420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10114288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9442377-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530356-B2 |
| priorityDate |
2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |