http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879726-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2008-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebcc00bf10cb48a053b8f0e9605cb62e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3974888ca42026bc9018021315049cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_629d1abf7e41125d6fd99b51f6407be4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28736119206a8c43b83612d006a6cb64 |
| publicationDate | 2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7879726-B2 |
| titleOfInvention | Methods of forming semiconductor devices using selective etching of an active region through a hardmask |
| abstract | A method of fabricating a semiconductor device is provided. The method can include forming a hard mask film including lower and upper hard mask films on a substrate in which an active region and an isolation region are defined and patterning the hard mask film to provide a hard mask pattern partially exposing the active region and the isolation region. An etchant can be applied to the active and isolation regions using the hard mask pattern as an etching mask to form a trench in the active region of the substrate while avoiding substantially etching the isolation region exposed to the etchant and a gate can be formed on the trench. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012164809-A1 |
| priorityDate | 2007-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.