| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2642 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2007-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_581e7af2e81f583e500bdf647de08b4d |
| publicationDate |
2010-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7851237-B2 |
| titleOfInvention |
Semiconductor device test structures and methods |
| abstract |
Semiconductor device test structures and methods are disclosed. In a preferred embodiment, a test structure includes a feed line, a stress line disposed proximate the feed line, and a conductive feature disposed between the stress line and the feed line. The test structure includes a temperature adjuster proximate at least the conductive feature, and at least one feedback device coupled to the temperature adjuster and at least the conductive feature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018074110-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9891261-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9032615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10794948-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8972922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014094029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10677833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8400178-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010278211-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9553054-B2 |
| priorityDate |
2007-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |