http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7842193-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a342e8b83b6c6b15785fa65744d3aa10 |
| publicationDate | 2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7842193-B2 |
| titleOfInvention | Polishing liquid |
| abstract | According to an aspect of the invention, there is provided a polishing liquid for polishing a barrier metal material on an interlayer insulation material, the polishing liquid having a pH of from 2.0 to 6.0 and including an aqueous solution containing a compound represented by the following formula (1), and polishing particles containing silicon oxide and dispersed in the aqueous solution: R 1 —(CH 2 ) m —(CHR 2 ) n —COOH (1) wherein m+n≦4; R 1 represents a hydrogen atom, a methyl group, an ethyl group or a hydroxyl group; R 2 represents a methyl group, an ethyl group, a benzene ring or a hydroxyl group; and when a plurality of R 2 s are present in the formula (1), they are the same or different from one another. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009101864-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008318427-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8470195-B2 |
| priorityDate | 2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 258.