| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-86 |
| filingDate |
2006-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2aecc7686775689b5e242e0786fd53d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3b33ee0ff4fa3917535872aecde0c70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81a7f1ecacc2b5af48f4ed65eedde97c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3d1b4a49fd1a27539f0c1f1c6c63026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2ab787e8feb477bbe38c5aa1e22530f |
| publicationDate |
2010-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7791055-B2 |
| titleOfInvention |
Electron induced chemical etching/deposition for enhanced detection of surface defects |
| abstract |
A method of imaging and identifying defects and contamination on the surface of an integrated circuit is described. The method may be used on areas smaller than one micron in diameter. An energetic beam, such as an electron beam, is directed at a selected IC location having a layer of a solid, fluid or gaseous reactive material formed over the surface. The energetic beam disassociates the reactive material in the region into chemical radicals that either chemically etch the surface preferentially, or deposit a thin layer of a conductive material over the local area around the energetic beam. The surface may be examined as various layers are selectively etched to decorate defects and/or as various layers are locally deposited in the area around the energetic beam. SEM imaging and other analytic methods may be used to identify the problem more easily. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10497541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8821682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807062-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8026501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7892978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017338080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010221922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8414787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8389415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008009140-A1 |
| priorityDate |
2006-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |