| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7d7254834b7d1e27fabc1ee76b4ee71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a9328eb31e78d64eedd085f8524b614 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0126 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00595 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7ec64d3da4bdac79c486fd68956b5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a104c9bf5f2fdea7ab9ec5b372eb4b20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d216cb723b4ba188d25cc581e2252e5c |
| publicationDate |
2010-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7723234-B2 |
| titleOfInvention |
Method for selective CMP of polysilicon |
| abstract |
A method of removing polysilicon in preference to silicon dioxide and/or silicon nitride by chemical mechanical polishing. The method removes polysilicon from a surface at a high removal rate while maintaining a high selectivity of polysilicon to silicon dioxide and/or a polysilicon to silicon nitride. The method is particularly suitable for use in the fabrication of MEMS devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013109182-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013034957-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8912092-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013109181-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435420-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440094-B1 |
| priorityDate |
2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |