| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2201-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10 |
| filingDate |
2004-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e6266ae028b7cd6850372f6996d4cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d43a70ad909b3d05046e0fe84045af4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a33a76e9a05a7a3c0063a06e2afe4f58 |
| publicationDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7678858-B2 |
| titleOfInvention |
Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof |
| abstract |
The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10401338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10400125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151254-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3156448-A4 |
| priorityDate |
2003-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |