| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f101d084de4edfe92fbade3affe1d832 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J127-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10 |
| filingDate |
2000-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af84889c693511b4e26be6e85976b79d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c297976f0c3ca98e7320336851aaa67 |
| publicationDate |
2001-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001192643-A |
| titleOfInvention |
Semiconductor manufacturing equipment seal |
| abstract |
(57) Abstract: An object of the present invention is to provide a seal for a semiconductor manufacturing apparatus excellent in oxygen-resistant plasma characteristics, gas permeability, and sealability. The object is to provide a vinylidene fluoride-propylene hexafluoride copolymer or a vinylidene fluoride-propylene hexafluoride-tetrafluoroethylene copolymer 10 Semiconductor production characterized in that 40 to 150 parts by weight of barium sulfate is mixed with 0 part by weight, and a composition in which an inorganic substance other than barium sulfate is reduced to 1 part by weight or less is crosslinked with an organic peroxide. Solved by device seals. Further, the problem is solved by a seal for a semiconductor manufacturing apparatus in which 0.5 to 30 parts by weight of an ethylene tetrafluoride resin is further added to the composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014088921-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004094527-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016502584-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1464671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4720501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004033580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005049712-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1464671-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003082301-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9315644-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114196146-A |
| priorityDate |
2000-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |