| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ced34b284868cee39b69d59fdafc19a7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-6421
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0035 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6456 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00 |
| filingDate |
2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83e6f62f5b1a36d5c6c3fb57aec5f74f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de673409c53a807fb5dc3f5bf5566d3f |
| publicationDate |
2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7668364-B2 |
| titleOfInvention |
Inspection method and apparatus for partially drilled microvias |
| abstract |
Inspection of partially drilled microvias by fluorescence based optical imaging techniques, selective coaxial illumination and multivariable off-axis illumination and the use of comparative image analysis and the transformation of back reflected radiation by means of an integrated fluorescing plate mounted to the surface of a CCD or EMCCD array. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008310702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10571252-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8131059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013037526-A1 |
| priorityDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |