| abstract |
A diode-pumped, solid-state laser ( 52 ) of a laser system ( 50 ) provides ultraviolet Gaussian output ( 54 ) that is converted by a diffractive optical element ( 90 ) into shaped output ( 94 ) having a uniform irradiance profile. A high percentage of the shaped output ( 94 ) is focused through an aperture of a mask ( 98 ) to provide imaged to provide imaged shaped output ( 118 ). The laser system ( 50 ) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias ( 20 b ) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system ( 150 ) employs a pair of beam diverting galvanometer mirrors ( 152, 154 ) that directs the Gaussian output around a shaped imaging system ( 70 ) that includes a diffractive optical element ( 90 ) and a mask ( 98 ). Laser system ( 150 ) provides a user with the option of using either a Gaussian output or an imaged shaped output ( 118 ). |