http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629258-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a9328eb31e78d64eedd085f8524b614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7d7254834b7d1e27fabc1ee76b4ee71 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7ec64d3da4bdac79c486fd68956b5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d216cb723b4ba188d25cc581e2252e5c |
| publicationDate | 2009-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7629258-B2 |
| titleOfInvention | Method for one-to-one polishing of silicon nitride and silicon oxide |
| abstract | The present invention provides a method of removing silicon nitride at about the same removal rate as silicon dioxide by CMP. The method utilizes a polishing slurry that includes colloidal silica abrasive particles dispersed in water and additives that modulate the silicon dioxide and silicon nitride removal rates such that they are about the same. In one embodiment of the invention, the additive is lysine or lysine mono hydrochloride in combination with picolinic acid, which is effective at a pH of about 8. In another embodiment of the invention, the additive is arginine in combination with picolinic acid, which is effective at a pH of about 10. |
| priorityDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 87.