http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521171-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b62a061db267544224c10495ee0cd640 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G2001-0672 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G2200-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G1-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G1-142 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2006-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbeaa5d2153414feb91da56a55a8cce5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87366d98d072da83c3eec9a7c40a273a |
| publicationDate | 2009-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7521171-B2 |
| titleOfInvention | Positive photosensitive resin, process for production thereof, and resist composition containing positive photosensitive resin |
| abstract | The positive photosensitive resin of the present invention has an acid-labile protecting group and the structure represented by the following general formula (1): n n(wherein X 1 and X 2 may be the sake or different and each independently a straight or branched chain hydrocarbon group, having 1 to 30 carbon atoms, an alicyclic hydrocarbon group or a heterocyclic group, which may substituted with straight or branched chain hydrocarbon of 1 to 6 carbon atoms or —O— hydrocarbon; Y 1 and Y 2 may be the same or different and are each independently a hydrogen atom, a straight or branched chain hydrocarbon group having 1 to 6 carbon atoms, a sulfur-containing hydrocarbon group, or an aromatic hydrocarbon group which may have a substituent; and two Zs may be the same or different and each independently an oxygen atom or a sulfur atom). |
| priorityDate | 2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 354.