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filingDate 2006-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2009-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15e6740c01962375ffd2523493c03d5e
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publicationDate 2009-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7485407-B2
titleOfInvention Siloxane compound, photoresist composition including the siloxane compound and method of forming a pattern using the photoresist composition
abstract Disclosed are a siloxane compound, a photoresist composition using the same, and a method of forming a pattern, wherein the siloxane compound is having a general formula: n nwherein R1 is a tertiary butyl group or a 1-(tert-butoxy)ethyl group, and R2 and R3 is each independently a lower alkyl group having 1 to 4 carbon atoms.
priorityDate 2005-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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