| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2002-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf92c6162f276a54a5782dd87f205c1 |
| publicationDate |
2005-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6852468-B2 |
| titleOfInvention |
Positive resist composition |
| abstract |
A positive resist composition comprising: (A) a resin capable of increasing the solubility in an alkali developer by the action of acid, in which the resin contains (A1) a repeating unit having at least one of a dihydroxyadamantyl group and a trihydroxyadamantyl group and (A2) a repeating unit containing an acid-decomposable group having an alicyclic structure; and (B) a compound capable of generating an acid upon irradiation with one of an actinic ray and a radiation, wherein the resin (A) contains the repeating unit (A1) and the repeating unit (A2) at a composition molar ratio: A1/A2 of from 0.15 to 1.0, and a total content of the repeating unit (A1) and the repeating unit (A2) in the resin (A) is 40 to 70 mole %. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007275324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006147832-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8168366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7476492-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7510822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004197707-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7485407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003224288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7252924-B2 |
| priorityDate |
2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |