| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70933
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate |
2005-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_288219d73f03464ee7bd3facdcc5a8d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58756dcf87c1842fb83a6256ef871583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cf174643cfe1e27bb2d71aa5946bb58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a870e8bd7a73299d4e39b818fc54bda6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a295532dc5df7b6e2c742c62770924f5 |
| publicationDate |
2009-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7479457-B2 |
| titleOfInvention |
Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof |
| abstract |
Atomic oxygen generated in oxygen stripping plasmas reacts with and damages low-k dielectric materials during stripping of dielectric post etch residues. While damage of low-k dielectric materials during stripping of dielectric post etch residues is lower with hydrogen stripping plasmas, hydrogen stripping plasmas exhibit lower strip rates. Inclusion of oxygen in a hydrogen stripping plasma improves both photoresist strip rate and uniformity, while maintaining a hydrogen to oxygen ratio avoids low-k dielectric material damage. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304668-B2 |
| priorityDate |
2005-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |