| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a889f61da5d49e4dca9f36e5d5559517 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J37-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07B61-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2004-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82dcb12d344f4755c7d57d68e40e78d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f2a7ed76a1b19a86f7244a8dffd53a6 |
| publicationDate |
2008-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7468466-B2 |
| titleOfInvention |
Process for producing hexafluoroethane and use thereof |
| abstract |
A process for producing hexafluoroethane, comprising a step of distilling a crude hexafluoroethane containing chlorine compounds each having two carbon atoms to distill out hexafluoroethane as a top flow from the top of a distillation column and separate a hexafluoroethane mixture containing the chlorine compounds as a bottom flow from the bottom, and a step of contacting the bottom flow with hydrogen fluoride in the gas phase at a temperature of 300 to 500° C. in the presence of a fluorination catalyst to fluorinate the chlorine compounds. This process provides hexafluoroethane which can be used mainly as a cleaning gas in the production process of a semiconductor device. |
| priorityDate |
2003-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |