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filingDate 2008-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7465593-B2
titleOfInvention Electronics device, semiconductor device, and method for manufacturing the same
abstract It is an object of the present invention to provide a high reliable EL display device and a manufacturing method thereof by shielding intruding moisture or oxygen which is a factor of deteriorating the property of an EL element without enlarging the EL display device. n In the invention, application is used as a method for forming a high thermostability planarizing film 16 , typically, an interlayer insulating film (a film which serves as a base film of a light emitting element later) of a TFT in which a skeletal structure is configured by the combination of silicon (Si) and oxygen (O). After the formation, an edge portion or an opening portion is formed to have a tapered shape. Afterwards, distortion is given by adding an inert element with a comparatively large atomic radius to modify or highly densify a surface (including a side surface) for preventing the intrusion of moisture or oxygen.
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