| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2005-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_393c5d0ed76256a836023c24081a0e81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1117c72bb43c0a0ca9f744975b1d4221 |
| publicationDate |
2008-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7405157-B1 |
| titleOfInvention |
Methods for the electrochemical deposition of copper onto a barrier layer of a work piece |
| abstract |
Methods are provided for electrochemically depositing copper on a work piece. One method includes the step of depositing overlying the work piece a barrier layer having a surface and subjecting the barrier layer surface to a surface treatment adapted to facilitate deposition of copper on the barrier layer. Copper then is electrochemically deposited overlying the barrier layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10692735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10443146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9064874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009038949-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10472730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I467696-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7857960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252679-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357599-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011195571-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009038951-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010273323-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8114770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7857961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I474436-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426236-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9607822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9472377-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009095507-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140051837-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11208732-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2244287-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010092579-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9469912-B2 |
| priorityDate |
2003-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |