| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2005-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44abe896688ed30a019a8ac9809792bf |
| publicationDate |
2007-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7291441-B2 |
| titleOfInvention |
Positive resist composition and pattern forming method utilizing the same |
| abstract |
A positive resist composition comprising: a resin that comprises a repeating unit including a specific norbornane lactone structure and a repeating unit including a specific alicyclic hydrocarbon structure, and that increases a solubility of the resin in an alkaline developer by an action of an acid; and a compound that generates an acid upon treatment with one of an actinic ray and radiation, and a pattern forming method utilizing the same. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009068342-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7488567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343694-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7972762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008305411-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7771913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231738-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015086926-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009233220-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9221742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006269871-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012288691-A1 |
| priorityDate |
2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |