| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-482 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C45-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26D7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29D11-00432
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-318 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate |
2005-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_252cfe5764c05aff7f26560b2464b1df |
| publicationDate |
2006-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7094660-B2 |
| titleOfInvention |
Method of manufacturing trench capacitor utilizing stabilizing member to support adjacent storage electrodes |
| abstract |
A semiconductor device has a stabilizing member that encloses an upper portion of a storage electrode to improve structural stability. A dielectric layer and a plate electrode are successively formed on the storage electrode including a stabilizing member. Since the stabilizing member includes a protruding portion to support the storage electrode and an adjacent storage electrode, all of the storage electrodes in a unit cell of a semiconductor device are structured to prevent a collapse. Also, the semdevice can have a very high height without collapse when the capacitors have extremely high aspect ratios. Therefore, the capacitors may have greatly enhanced capacitance in comparison with a conventional capacitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046382-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006197135-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007004194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009267197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11348924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009268370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010279485-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8111501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9647056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7351667-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012064680-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021384196-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8114733-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7994561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014065785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007090325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11751379-B2 |
| priorityDate |
2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |