| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fdef90809be1315a4a17a59eaaaeca4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-552 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate |
2005-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77ac5294e9bb6a16a8a31391a6c63ad3 |
| publicationDate |
2006-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7081958-B2 |
| titleOfInvention |
Analytical method and apparatus |
| abstract |
A method of examining thin layer structures on a surface for differences in respect of optical thickness, which method comprises the steps of: irradiating the surface with light so that the light is internally or externally reflected at the surface; imaging the reflected light on a first two-dimensional detector; sequentially or continuously scanning the incident angle and/or wavelength of the light over an angular and/or wavelength range; measuring the intensities of light reflected from different parts of the surface and impinging on different parts of the detector, at at least a number of incident angles and/or wavelengths, the intensity of light reflected from each part of the surface for each angle and/or wavelength depending on the optical thickness of the thin layer structure thereon; and determining from the detected light intensities at the different light incident angles and/or wavelengths an optical thickness image of the thin layer structures on the surface. According to the invention, part of the light reflected at said surface is detected on a second detector to determine the incident angle or wavelength of the polarized light irradiating the surface. An apparatus for carrying out the method is also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9682372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7251085-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10300479-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11474109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10300450-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7460236-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10719915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7262866-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008030738-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006262313-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8970838-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9041923-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007013912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9682396-B2 |
| priorityDate |
1997-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |