| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa8899e588de523522e343f990a6ad44 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate |
2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48b6c2b8b6640b6e45c0cfd2b66e6ba7 |
| publicationDate |
2006-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7078919-B2 |
| titleOfInvention |
In situ determination of resistivity, mobility and dopant concentration profiles |
| abstract |
The present invention provides techniques for an in-situ measurement of resistivity profiles and dopant concentration distributions in semiconductor structures, such as shallow junctions. A substrate with a resistor test structure having a conduction circuit may be placed at a measurement station, surface layers may be successively removed from the conduction circuit at the measurement station, a sheet resistance of the conduction circuit may be measured at the measurement station after the removal of each surface layer to generate a plurality of sheet resistance measurements, and the resistivity profile may be calculated from the plurality of sheet resistance measurements. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9852956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9689935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9041389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8571812-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010253372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9064760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9075107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10197640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699622-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7622312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014342472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008108155-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013082694-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8395399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005225345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9678040-B2 |
| priorityDate |
2003-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |