http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2281402-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1994-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67edc4362ea8ccca842c32324c386fae |
| publicationDate | 1995-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2281402-A |
| titleOfInvention | Method for evaluating semiconductor layer |
| abstract | An evaluating method for a semiconductor layer includes repetition of calculating the resistivity X and the Hall constant Y per unit thickness of the layer and removing a predetermined thickness surface layer portion. The resistivity X' and the Hall constant Y' per unit thickness for respective layers are calculated employing the plurality of resistivity X' and Hall constants Y' per unit thickness previously calculated for other layers:- <IMAGE> The depth direction profiles of the carrier concentration and the mobility of the semiconductor layer can be deduced without employing the entire layer thickness of the semiconductor layer the exact value of which cannot be known. A higher precision evaluation can be achieved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6579730-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03008955-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005022135-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078919-B2 |
| priorityDate | 1993-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546359 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91501 |
Total number of triples: 20.