Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-72 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-72 |
filingDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2006-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e98606586ea568ade61e9544a3e63ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af9bcd4fcca3d996b4d708a23c010a99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ebd41a0e56d04eebbe7f2ffb65ff294 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ab47f00e999231cfa20a0b813e6fa2 |
publicationDate |
2006-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7070476-B2 |
titleOfInvention |
In-situ metalization monitoring using eddy current measurements during the process for removing the film |
abstract |
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9528814-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006109001-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011068807-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952708-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465089-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8013599-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8547110-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8179530-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7751046-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8502979-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021379724-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012158930-A1 |
priorityDate |
1999-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |