| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f3e00759735d0de6f395184c1e68989 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| filingDate |
1994-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c05cb3b28feca7135d1fe089091b94a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8b9c4d6b46cf1d82048b98e794ff4c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e250e7b1d80bf783b2d360fdf147c27e |
| publicationDate |
1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0631147-A1 |
| titleOfInvention |
Eddy current test method and apparatus |
| abstract |
A method and apparatus for performing conductance measurements on a sample using an eddy current probe, without the need for measurement or knowledge of the separation between probe and sample. The probe comprises sense and drive coils mounted in close proximity to each other (or a single coil which functions as both a sense and drive coil), circuitry for producing AC voltage in the drive coil, and a meter for measuring in-phase and quadrature components of induced voltage in the sense coil. Look-up table data can be generated for use in subsequent measurements on samples of unknown conductance by performing eddy current measurements on samples having different known conductances to generate reference lift-off curves, processing the reference lift-off curves to determine a conductance function relating each known conductance to a location along a selected curve, and storing conductance values determined by the conductance function for different points on the selected curve as the look-up table data. An unknown sample conductance can then be determined by generating a lift-off curve from voltage measurements at different probe separations from the sample, determining a new intersection voltage pair representing the intersection of the lift-off curve with the selected curve, and determining the unknown conductance as a look-up table value indexed by the new intersection voltage pair. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1734374-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6707540-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6433541-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5854553-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7070476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6621264-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7215117-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03034054-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03034054-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7492178-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1052505-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7005851-B2 |
| priorityDate |
1993-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |