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filingDate 2003-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationNumber US-7034380-B2
titleOfInvention Low-dielectric constant structure with a multilayer stack of thin films with pores
abstract The present invention describes a structure having a multilayer stack of thin films, the thin films being a low-dielectric constant material, the thin films having pores, and a method of forming such a structure.
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