| abstract |
This invention pertains to complex mixtures of the formula M is a metal having a valence of from 2–6, L1 is an anionic ligand and L2 is a siloxide or silyl amide ligand suited for producing stable thin-film metal silicates, v is equal to the valence of the metal, and 0<x<v. The bonding is such that an M—O—Si or an M—N—Si linkage exists, respectively, and the stability for the complex is provided by the organic ligand. The invention also relates to a process for preparing the metal siloxide complexes. n Thus, the complexes can be represented by the formulasn n(R) m M—(O—SiR 1 R 2 R 3 ) n n nandn n(R) m M—[N—(SiR 1 R 2 R 3 ) y (R 4 ) 2- y ] n n nwherein M is a metal having a valence of 2–6, m and n are positive integers and m plus n is equal to the valence of the metal M. The R type groups, i.e., R, R 1 , R 2 , R 3 , and R 4 represent an organo ligand. |