http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7015144-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76837
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
filingDate 2004-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6ca79f4483c7fa4591b0c346faad3d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfc22a53765b5a189751025577abf230
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_971021c4711fc5d6014ed5b525aeeae8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30dec5a2e5c57e758c195e40af2eba1f
publicationDate 2006-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7015144-B2
titleOfInvention Compositions including perhydro-polysilazane used in a semiconductor manufacturing process and methods of manufacturing semiconductor devices using the same
abstract Compositions that can be used in semiconductor manufacturing processes, comprising perhydro-polysilazane having a weight average molecular weight of about 300 to about 3,000 and a polydispersity index of about 1.8 to about 3.0 are provided. Solutions comprising the compositions of the present invention, methods of forming films in a semiconductor manufacturing process, and methods of manufacturing semiconductor devices are also provided.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007281498-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010203299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010183851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7270886-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009546-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010308015-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004224537-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010040838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7999355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2144279-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582573-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501394-B2
priorityDate 2003-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0616410-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5885654-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002301429-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6706646-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6340641-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1278238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010100749-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003040194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002160614-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020068672-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6762126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001308090-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8909
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405630

Total number of triples: 69.