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filingDate 2004-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6967326-B2
titleOfInvention Mass spectrometers on wafer-substrates
abstract An apparatus includes a semiconductor or dielectric wafer-substrate and first and second multi-layer structures located over the wafer-substrate. The first multi-layer structure includes an ionizer or an electronic ion detector. The second multi-layer structure includes an ion trap having entrance and exit ports. The ionizer or electronic ion detector has a port coupled to one of the ports of the ion trap.
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