http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6940134-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S257-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
filingDate 2002-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd2e980544f1e7a6d4fe6a0b9e920816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58c55c8a433fde54e93d7037d48817a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc125a64842b94689f039e8d956052fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0951ff354a86ce9d2d76f8a3685c18c2
publicationDate 2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6940134-B2
titleOfInvention Semiconductor with contact contacting diffusion adjacent gate electrode
abstract Methods of forming a contact to a gate electrode or substrate despite misalignment of the contact opening due to lithographic techniques, and a semiconductor having such a contact. Silicide can be created on the gate and/or diffusion using the invention.
priorityDate 2002-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6274471-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5369303-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316311-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5997757-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6271108-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5899742-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5792703-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6274468-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6426263-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5043778-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6281143-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5691561-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5879997-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6294449-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127450776

Total number of triples: 40.