| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3d6fa926ef6ac3947565c2d90afae18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-201 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-14 |
| filingDate |
2002-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92a5aa2cd415705b4b76481b6d4d09b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a822d07572f8241cb16c974b9e7797ec |
| publicationDate |
2005-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6875544-B1 |
| titleOfInvention |
Method for the fabrication of three-dimensional microstructures by deep X-ray lithography |
| abstract |
A method for the fabrication of three-dimensional microstructures by deep X-ray lithography (DXRL) comprises a masking process that uses a patterned mask with inclined mask holes and off-normal exposures with a DXRL beam aligned with the inclined mask holes. Microstructural features that are oriented in different directions can be obtained by using multiple off-normal exposures through additional mask holes having different orientations. Various methods can be used to block the non-aligned mask holes from the beam when using multiple exposures. A method for fabricating a precision 3D X-ray mask comprises forming an intermediate mask and a master mask on a common support membrane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373908-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008010959-A2 |
| priorityDate |
2002-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |