| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2001-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate |
2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6815646-B2 |
| titleOfInvention |
Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober |
| abstract |
The present invention discloses a ceramic substrate for semiconductor manufacture and/or inspection conducive to decrease radiated alpha-rays and to minimize changes in thermal conductivity as a function of time, thereby yielding a superior temperature controllability. This invention is related to a ceramic substrate for apparatuses for use in semiconductor manufacture and/or inspection, wherein the level of alpha-rays radiated from said ceramic substrate exceeds 0.25 c/cm<2>.hr and is not higher than 50 c/cm<2>.hr. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011000426-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8226769-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7645963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021159099-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013037532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009068598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8663391-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7708860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012285619-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007046305-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007095477-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018047605-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007258186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012223069-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993939-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010193501-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138121-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10242890-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018076062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006088692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8405005-B2 |
| priorityDate |
2000-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |