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filingDate 2001-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6805812-B2
titleOfInvention Phosphono compound-containing polishing composition and method of using same
abstract The invention provides a chemical-mechanical polishing system for a substrate comprising a liquid carrier, a polishing pad and/or an abrasive, a per-type oxidizer, and a phosphono group-containing additive, as well as a method of using the same to polish substrates, particularly nickel-containing substrates.
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