| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4910cb05bbe27188562a5a66f0abfb1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-226 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G81-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-336 |
| filingDate |
2002-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56a33b51685354699e71e7c87033f1c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_061efc8894ab36a5d7f2458dc9186d0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48cc5d50e269695fda17db318490b701 |
| publicationDate |
2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6787610-B2 |
| titleOfInvention |
Plasma-resistant fluorine-based elastomer sealing material |
| abstract |
An elastomer sealing material having low dielectric constant and low dielectric dissipation, which is satisfactory with both of resistance to oxygen plasma and non-adhesion to quartz and can be applied to apparatus utilizing microwaves, is disclosed. The plasma-resistant fluorine-based elastomer sealing material comprises a fluorine-based elastomer having a divalent perfluoropolyether or divalent perfluoroalkylene structure in the main chain thereof and having two or more hydrosilyl groups and addition-reactive alkenyl groups in the terminals or side chains thereof, and a polymer having two or more hydrosilyl groups in the molecule and being capable of addition reacting with the alkenyl groups, the fluorine-based elastomer being crosslinked with the polymer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008042107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007155949-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007152195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7476339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007154717-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007154716-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006100343-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153986-A1 |
| priorityDate |
2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |