| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e40ceab05afbe887909abf7467edd987 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2001-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e65c95be3946213dc0e55024907d84e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_175229c759df55091b973955c2cece99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cef5083f52bc499a7770ab683c7e3bf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bce5e4e8f45b008233940562e6d16a3c |
| publicationDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6764809-B2 |
| titleOfInvention |
CO2-processes photoresists, polymers, and photoactive compounds for microlithography |
| abstract |
A process of forming a resist image in a microelectronic substrate comprises the steps of contacting the substrate with a composition first comprising carbon dioxide and a component selected from the group consisting of at least one polymeric precursor, at least one monomer, at least one polymeric material, and mixtures thereof to deposit the component on the substrate and form a coating thereon; then imagewise exposing the coating to radiation such that exposed and unexposed coating portions are formed; then subjecting the coating to a second composition comprising carbon dioxide having such that either one of the exposed or the unexposed coating portions are removed from the substrate and the other coating portion is developed and remains on the coating to form an image thereon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7211365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006172144-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7205086-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003235785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7300739-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008233517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7045268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7138333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004038151-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007259274-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006081534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004137360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005175229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227183-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7393624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095828-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007026339-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7648818-B2 |
| priorityDate |
2000-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |