http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759341-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df2c3aa5e68d585532c3f7dc2ca14791 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2003-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8821ddd21697fc3060ea93579743709b |
| publicationDate | 2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6759341-B1 |
| titleOfInvention | Wafering method comprising a plasma etch with a gas emitting wafer holder |
| abstract | To reduce the edge roll off in a semiconductor wafering process, the wafer ( 110 ) is subject to a plasma etch with an edge underetch. The edge underetch is achieved by means of a wafer holder ( 410 ) that emits gas towards the wafer (e.g. a gas vortex) to draw the wafer towards the holder's body ( 460 ). The plasma impinges on the wafer surface ( 110.1 ) opposite to the body. Some of the gas emitted by the holder wraps around the wafer edge and dilutes the etchant near the wafer edge. Consequently, the etch proceeds slower near the edge (the edge is underetched). In some embodiments, the wafer is rotated around an axis ( 440 ) passing through the wafer to increase the underetch. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012129318-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101872735-A |
| priorityDate | 2003-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.