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filingDate 2002-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6706383-B1
titleOfInvention Polishing pad support that improves polishing performance and longevity
abstract The present invention provides, polishing pad with improved polishing properties and longevity. The pad is comprised of a thermoplastic foam substrate having a surface comprised of concave cells. A polishing agent coats an interior surface of the concave cells. The invention includes a method for preparing the polishing pad, and a polishing apparatus comprising the polishing pad.
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