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publicationDate 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6689540-B2
titleOfInvention Polymers and use thereof
abstract Compositions comprising a polymer having silicon, germanium and/or tin; and a protecting group grafted onto a polymeric backbone are useful as resists and are sensitive to imaging irradiation while exhibiting enhanced resistance to reactive ion etching.
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