http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6689529-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68c213ba9952360f439567152e047b18 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2001-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4841fc8647f7710f1b79e9fe48d40597 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac395666d912fddc14d2c2960de6e2f0 |
| publicationDate | 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6689529-B2 |
| titleOfInvention | Method for measuring diffusion of photogenerated catalyst in chemically amplified resists |
| abstract | A method of imaging acid in a chemically amplified photoresist comprising the steps of: (a) exposing the chemically amplified photoresist to radiation thereby generating an acid, the chemically amplified photoresist comprising at least one species of pH-dependent fluorophore that fluoresces in the presence of the acid, the pH-dependent fluorophore being present at a concentration that enables the fluorescence from individual molecules of the pH-dependent fluorophore to be individually resolved; and (b) generating an image of the acid in the photoresist, the image comprising at least one or a plurality of discrete points corresponding to the fluorescent emission from an individual molecule or molecules of the pH-dependent fluorophore. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007106973-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7571424-B2 |
| priorityDate | 2000-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.