http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5252435-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 1991-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1993-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cdd139ea6e212b050c54fc6f2246ed9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c49950f6c8504adbec9ffdb18c4fd8c5
publicationDate 1993-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5252435-A
titleOfInvention Method for forming pattern
abstract A pattern with high contrast and good adhesive-ness to a substrate can be formed by forming on a substrate a film of pattern forming material comprising (a) a resin having functional groups and hydrophilic groups, (b) a photoacid generator, and (c) a solvent, exposing the film selectively to light, heating the exposed film and developing the resulting film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148584-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5609989-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6689529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I788477-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011182130-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8054109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6303263-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7344827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6235439-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7415312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7403834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6268436-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6384169-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5547812-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5733705-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004224513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5626782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7267923-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006089740-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6511785-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6022665-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007105042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7618763-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6136502-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5667938-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6414101-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5844057-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6156481-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005267606-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6103447-A
priorityDate 1990-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4537854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4883740-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5017461-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4610952-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5055439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5035979-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129149658
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID589711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69404
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128585769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128177518
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129294975
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129705757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135893109
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4663752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129494281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID277296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127786062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128418210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10751189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129381980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129418971
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128540257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128521623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129150992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6407

Total number of triples: 80.